JPS6321855B2 - - Google Patents

Info

Publication number
JPS6321855B2
JPS6321855B2 JP55144058A JP14405880A JPS6321855B2 JP S6321855 B2 JPS6321855 B2 JP S6321855B2 JP 55144058 A JP55144058 A JP 55144058A JP 14405880 A JP14405880 A JP 14405880A JP S6321855 B2 JPS6321855 B2 JP S6321855B2
Authority
JP
Japan
Prior art keywords
light
bright
field illumination
dark
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55144058A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5767844A (en
Inventor
Shoichi Tanimoto
Kazunori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP14405880A priority Critical patent/JPS5767844A/ja
Publication of JPS5767844A publication Critical patent/JPS5767844A/ja
Publication of JPS6321855B2 publication Critical patent/JPS6321855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14405880A 1980-10-15 1980-10-15 Surface inspecting device Granted JPS5767844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14405880A JPS5767844A (en) 1980-10-15 1980-10-15 Surface inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14405880A JPS5767844A (en) 1980-10-15 1980-10-15 Surface inspecting device

Publications (2)

Publication Number Publication Date
JPS5767844A JPS5767844A (en) 1982-04-24
JPS6321855B2 true JPS6321855B2 (en]) 1988-05-09

Family

ID=15353326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14405880A Granted JPS5767844A (en) 1980-10-15 1980-10-15 Surface inspecting device

Country Status (1)

Country Link
JP (1) JPS5767844A (en])

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置
JPS6129712A (ja) * 1984-07-23 1986-02-10 Hitachi Ltd 微細パタ−ンの欠陥検出方法及びその装置
JPH0613963B2 (ja) * 1984-09-07 1994-02-23 株式会社日立製作所 表面欠陥検査方法
JPH061179B2 (ja) * 1985-01-31 1994-01-05 株式会社日立製作所 欠陥検査方法及びその装置
JPH061183B2 (ja) * 1985-10-03 1994-01-05 株式会社日立製作所 欠陥検査方法及びその装置
JPS6285809A (ja) * 1985-10-11 1987-04-20 Mitsubishi Electric Corp パタ−ン認識用照明装置
JP2512050Y2 (ja) * 1986-02-18 1996-09-25 株式会社 東京精密 非接触検出装置における観察装置
FR2665259B1 (fr) * 1990-07-27 1992-10-16 Giat Ind Sa Procede et appareil de determination de la qualite de pieces optiques.
JP2981117B2 (ja) * 1993-06-08 1999-11-22 三菱電機株式会社 微小異物の検出および検査方法、それに用いられる走査型プローブ顕微鏡ならびにこれらを用いた半導体素子または液晶表示素子の製法
JP2827843B2 (ja) * 1993-10-18 1998-11-25 村田機械株式会社 パッケージの汚れ検査方法
US6407373B1 (en) * 1999-06-15 2002-06-18 Applied Materials, Inc. Apparatus and method for reviewing defects on an object
US7782452B2 (en) * 2007-08-31 2010-08-24 Kla-Tencor Technologies Corp. Systems and method for simultaneously inspecting a specimen with two distinct channels
WO2022270015A1 (ja) * 2021-06-21 2022-12-29 ソニーグループ株式会社 生体標本観察装置及び生体標本観察システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102792A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Simultaneous inspecting apparatus of inside and outside of body to be inspected
JPS54101389A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspecting method

Also Published As

Publication number Publication date
JPS5767844A (en) 1982-04-24

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